Micro-Electrical-Mechanical Systems

A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.

Year introduced: 2009

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Tree Number(s): E07.305.343, J01.637.509

MeSH Unique ID: D055617

Entry Terms:

• Micro-Electrical-Mechanical System
• Micro Electrical Mechanical Systems
• System, Micro-Electrical-Mechanical
• Systems, Micro-Electrical-Mechanical
• MEMS
• Micro-Electro-Mechanical Systems
• Micro-Electro-Mechanical System
• Micro Electro Mechanical Systems
• System, Micro-Electro-Mechanical
• Systems, Micro-Electro-Mechanical
• BioMEMS

All MeSH Categories
Analytical, Diagnostic and Therapeutic Techniques and Equipment Category
Equipment and Supplies
Electrical Equipment and Supplies
Micro-Electrical-Mechanical Systems
Lab-On-A-Chip Devices
Microphysiological Systems

All MeSH Categories
Technology and Food and Beverages Category
Technology, Industry, and Agriculture
Manufactured Materials
Micro-Electrical-Mechanical Systems